Defect detection method for stamped patterns utilizing random access parallel matching technique

Yoshihiro Shima, Seiji Kashioka, Toshikazu Yasue. Defect detection method for stamped patterns utilizing random access parallel matching technique. Systems and Computers in Japan, 18(1):79-90, 1987. [doi]

Authors

Yoshihiro Shima

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Seiji Kashioka

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Toshikazu Yasue

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