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A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao. A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions. Sensors, 18(2):398, 2018. [doi]

Authors

Yuki Shimizu

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Satoshi Kataoka

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Tatsuya Ishikawa

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Yuan-Liu Chen

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Xiuguo Chen

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Hiraku Matsukuma

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Wei Gao

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