A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao. A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions. Sensors, 18(2):398, 2018. [doi]

@article{ShimizuKICCMG18,
  title = {A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions},
  author = {Yuki Shimizu and Satoshi Kataoka and Tatsuya Ishikawa and Yuan-Liu Chen and Xiuguo Chen and Hiraku Matsukuma and Wei Gao},
  year = {2018},
  doi = {10.3390/s18020398},
  url = {https://doi.org/10.3390/s18020398},
  researchr = {https://researchr.org/publication/ShimizuKICCMG18},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {18},
  number = {2},
  pages = {398},
}