A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

Kumjae Shin, Junsik Jeon, James Edward West, Wonkyu Moon. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor. Sensors, 15(8):20232-20249, 2015. [doi]

Abstract

Abstract is missing.