Woosuck Shin, Maiko Nishibori, Toshio Itoh, Noriya Izu, Ichiro Matsubara. Enhancing the Responsiveness of Thermoelectric Gas Sensors with Boron-Doped and Thermally Annealed SiGe Thin Films via Low-Pressure Chemical Vapor Deposition. Sensors, 24(10):3058, May 2024. [doi]
Abstract is missing.