Seungyong Shin, Haoran Wen, Hyun-Keun Kwon, Gabrielle D. Vukasin, Thomas W. Kenny, Farrokh Ayazi. A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.