Systematic study of thermal stability of AlGaN/GaN two-dimensional electron gas structure with SiN surface passivation

Kenji Shiojima, Suehiro Sugitani, Naoteru Shigekawa. Systematic study of thermal stability of AlGaN/GaN two-dimensional electron gas structure with SiN surface passivation. IEICE Electronic Express, 1(7):160-164, 2004. [doi]

Authors

Kenji Shiojima

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Suehiro Sugitani

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Naoteru Shigekawa

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