Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism

Bijan Shirinzadeh, Umesh Bhagat, Yanling Tian. Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism. IJIMR, 1(3):31-45, 2011. [doi]

Authors

Bijan Shirinzadeh

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Umesh Bhagat

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Yanling Tian

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