Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism

Bijan Shirinzadeh, Umesh Bhagat, Yanling Tian. Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism. IJIMR, 1(3):31-45, 2011. [doi]

Abstract

Abstract is missing.