Optical MEMS accelerometer sensor relying on a micro-ring resonator and an elliptical disk

Ali Kazemi Nasaban Shotorban, Kian Jafari, Kambiz Abedi. Optical MEMS accelerometer sensor relying on a micro-ring resonator and an elliptical disk. IET Circuits, Devices & Systems, 13(7):1102-1106, 2019. [doi]

Abstract

Abstract is missing.