Optimized integrated micro-hotplates in CMOS technology

Martin Siegele, Christoph Gamauf, Alexander Nemecek, Giorgio C. Mutinati, Stephan Steinhauer, Anton Köck, Jochen Kraft, Jorg Siezert, Franz Schrank. Optimized integrated micro-hotplates in CMOS technology. In IEEE 11th International New Circuits and Systems Conference, NEWCAS 2013, Paris, France, June 16-19, 2013. pages 1-4, IEEE, 2013. [doi]

Abstract

Abstract is missing.