Realizing a Highly Compact Particulate Matter Sensor With a MEMS-Based Resonant Membrane

Navpreet Singh, Mohannad Y. Elsayed, Mourad N. El-Gamal. Realizing a Highly Compact Particulate Matter Sensor With a MEMS-Based Resonant Membrane. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]

@inproceedings{SinghEE19,
  title = {Realizing a Highly Compact Particulate Matter Sensor With a MEMS-Based Resonant Membrane},
  author = {Navpreet Singh and Mohannad Y. Elsayed and Mourad N. El-Gamal},
  year = {2019},
  doi = {10.1109/SENSORS43011.2019.8956505},
  url = {https://doi.org/10.1109/SENSORS43011.2019.8956505},
  researchr = {https://researchr.org/publication/SinghEE19},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019},
  publisher = {IEEE},
  isbn = {978-1-7281-1634-1},
}