Navpreet Singh, Mohannad Y. Elsayed, Mourad N. El-Gamal. Realizing a Highly Compact Particulate Matter Sensor With a MEMS-Based Resonant Membrane. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.