Prashant Singh, Pooja Srivastava, Ram Mohan Verma, Saurabh Jaiswal. Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive Accelerometer. In Manoj Singh Gaur, Mark Zwolinski, Vijay Laxmi, Dharmendra Boolchandani, Virendra Singh, Adit D. Singh, editors, VLSI Design and Test, 17th International Symposium, VDAT 2013, Jaipur, India, July 27-30, 2013, Revised Selected Papers. Volume 382 of Communications in Computer and Information Science, pages 249-256, Springer, 2013. [doi]
Abstract is missing.