A cellular automaton methodology for the simulation of integrated circuit fabrication processes

Georgios Ch. Sirakoulis, Ioannis Karafyllidis, Adonios Thanailakis. A cellular automaton methodology for the simulation of integrated circuit fabrication processes. Future Generation Comp. Syst., 18(5):639-657, 2002. [doi]

Authors

Georgios Ch. Sirakoulis

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Ioannis Karafyllidis

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Adonios Thanailakis

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