Experimental study on variations of WIPLOAD Control in semiconductor wafer fabrication environment

Appa Iyer Sivakumar, Chao Qi, Andy Darwin Kasan Hidayat. Experimental study on variations of WIPLOAD Control in semiconductor wafer fabrication environment. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2035-2040, WSC, 2008. [doi]

Abstract

Abstract is missing.