Investigation of monolayer MX2 as sub-nanometer copper diffusion barriers - researchr publication authors

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Kirby K. H. Smithe, Zhongwei Zhu, Connor S. Bailey, Eric Pop, Alex Yoon. Investigation of monolayer MX2 as sub-nanometer copper diffusion barriers. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 1, IEEE, 2018. [doi]

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