Improved MEMS AE sensors in HARM technology

R. Sommer, Markus Freitag, J. Schaufuss, Alexander Sorger, Jam Mehner. Improved MEMS AE sensors in HARM technology. In IEEE 11th International Multi-Conference on Systems, Signals & Devices, SSD 2014, Castelldefels-Barcelona, Spain, February 11-14, 2014. pages 1-4, IEEE, 2014. [doi]

Abstract

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