Seunghwan Song, Jun-Geol Baek. New Anomaly Detection in Semiconductor Manufacturing Process using Oversampling Method. In Ana Paula Rocha 0001, Luc Steels, H. Jaap van den Herik, editors, Proceedings of the 12th International Conference on Agents and Artificial Intelligence, ICAART 2020, Volume 2, Valletta, Malta, February 22-24, 2020. pages 926-932, SCITEPRESS, 2020. [doi]
Abstract is missing.