Ziyang Song, Jian Cui, Qiancheng Zhao. A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 477-481, IEEE, 2019. [doi]
Abstract is missing.