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Investigation on the Impact of Excitation Amplitude on AFM-TM Microcantilever Beam System's Dynamic Characteristics and Implementation of an Equivalent Circuit

Peijie Song, Xiaojuan Li, Jianjun Cui, Kai Chen, Yandong Chu. Investigation on the Impact of Excitation Amplitude on AFM-TM Microcantilever Beam System's Dynamic Characteristics and Implementation of an Equivalent Circuit. Sensors, 24(1):107, 2024. [doi]

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