A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications

Bo Woon Soon, N. Singh, J. M. Tsai, Chengkuo Lee. A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 562-565, IEEE, 2013. [doi]

Abstract

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