Frédéric Souchon, Loic Joët, Carine Ladner, Patrice Rey, Stephan Louwers. High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.