J. F. Souza, M. B. Lima, I. Doi, P. J. Tatsch, J. A. Diniz, J. L. Gonçalves. SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors. In Joaquim Gabriel, Carlos Manuel B. A. Correia, Ana L. N. Fred, Hugo Gamboa, editors, BIODEVICES 2012 - Proceedings of the International Conference on Biomedical Electronics and Devices, Vilamoura, Algarve, Portugal, 1 - 4 February, 2012. pages 302-306, SciTePress, 2012.
@inproceedings{SouzaLDTDG12,
title = {SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors},
author = {J. F. Souza and M. B. Lima and I. Doi and P. J. Tatsch and J. A. Diniz and J. L. Gonçalves},
year = {2012},
researchr = {https://researchr.org/publication/SouzaLDTDG12},
cites = {0},
citedby = {0},
pages = {302-306},
booktitle = {BIODEVICES 2012 - Proceedings of the International Conference on Biomedical Electronics and Devices, Vilamoura, Algarve, Portugal, 1 - 4 February, 2012},
editor = {Joaquim Gabriel and Carlos Manuel B. A. Correia and Ana L. N. Fred and Hugo Gamboa},
publisher = {SciTePress},
isbn = {978-989-8425-91-1},
}