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SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors

J. F. Souza, M. B. Lima, I. Doi, P. J. Tatsch, J. A. Diniz, J. L. Gonçalves. SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors. In Joaquim Gabriel, Carlos Manuel B. A. Correia, Ana L. N. Fred, Hugo Gamboa, editors, BIODEVICES 2012 - Proceedings of the International Conference on Biomedical Electronics and Devices, Vilamoura, Algarve, Portugal, 1 - 4 February, 2012. pages 302-306, SciTePress, 2012.

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