Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling

Rowan Spencer, Pavlos A. Gkinis, E. D. Koronaki, Dimitrios I. Gerogiorgis, Stéphane P. A. Bordas, Andreas G. Boudouvis. Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling. Computers & Chemical Engineering, 149:107289, 2021. [doi]

Authors

Rowan Spencer

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Pavlos A. Gkinis

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E. D. Koronaki

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Dimitrios I. Gerogiorgis

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Stéphane P. A. Bordas

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Andreas G. Boudouvis

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