Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling

Rowan Spencer, Pavlos A. Gkinis, E. D. Koronaki, Dimitrios I. Gerogiorgis, Stéphane P. A. Bordas, Andreas G. Boudouvis. Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling. Computers & Chemical Engineering, 149:107289, 2021. [doi]

Abstract

Abstract is missing.