Statistical Yield Modeling for Sub-wavelength Lithography - researchr publication authors

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Aswin Sreedhar, Sandip Kundu. Statistical Yield Modeling for Sub-wavelength Lithography. In Douglas Young, Nur A. Touba, editors, 2008 IEEE International Test Conference, ITC 2008, Santa Clara, California, USA, October 26-31, 2008. pages 1-8, IEEE, 2008. [doi]

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