On design of test structures for lithographic process corner identification

Aswin Sreedhar, Sandip Kundu. On design of test structures for lithographic process corner identification. In Design, Automation and Test in Europe, DATE 2011, Grenoble, France, March 14-18, 2011. pages 800-805, IEEE, 2011. [doi]

Authors

Aswin Sreedhar

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Sandip Kundu

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