Maria Stangoni, Mauro Ciappa, Marco Buzzo, M. Leicht, Wolfgang Fichtner. Simulation and Experimental Validation of Scanning Capacitance Microscopy Measurements across Low-doped Epitaxial PN-Junction. Microelectronics Reliability, 42(9-11):1701-1706, 2002. [doi]
@article{StangoniCBLF02,
title = {Simulation and Experimental Validation of Scanning Capacitance Microscopy Measurements across Low-doped Epitaxial PN-Junction},
author = {Maria Stangoni and Mauro Ciappa and Marco Buzzo and M. Leicht and Wolfgang Fichtner},
year = {2002},
doi = {10.1016/S0026-2714(02)00215-9},
url = {http://dx.doi.org/10.1016/S0026-2714(02)00215-9},
researchr = {https://researchr.org/publication/StangoniCBLF02},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {42},
number = {9-11},
pages = {1701-1706},
}