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Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology

K. J. Stanley, Timothy D. Stanley, José Maia. Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1369-1376, ACM, 2002. [doi]

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K. J. Stanley

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Timothy D. Stanley

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José Maia

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