K. J. Stanley, Timothy D. Stanley, José Maia. Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1369-1376, ACM, 2002. [doi]
Abstract is missing.