Contact Mechanics Description of Inelastic Displacement Response of a Nano-Positioning Device

Michael J. Starra, E. David Reedy, Alex D. Corwina, Robert W. Carpick, Erin E. Flater. Contact Mechanics Description of Inelastic Displacement Response of a Nano-Positioning Device. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 421-420, IEEE Computer Society, 2005. [doi]

Abstract

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