An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Johannes Stegner, Sebastian Gropp, Dmitry Podoskin, Uwe Stehr, Martin Hoffmann, Matthias A. Hein. An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements. Sensors, 18(7):2159, 2018. [doi]

@article{StegnerGPSHH18,
  title = {An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements},
  author = {Johannes Stegner and Sebastian Gropp and Dmitry Podoskin and Uwe Stehr and Martin Hoffmann and Matthias A. Hein},
  year = {2018},
  doi = {10.3390/s18072159},
  url = {https://doi.org/10.3390/s18072159},
  researchr = {https://researchr.org/publication/StegnerGPSHH18},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {18},
  number = {7},
  pages = {2159},
}