Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides

Matthew A. Stott, Thomas A. Wall, Erik Hamilton, Roger Chu, Aaron R. Hawkins, Damla Ozcelik, Joshua W. Parks, Gopikrishnan G. Meena, Holger Schmidt. Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides. In IEEE 58th International Midwest Symposium on Circuits and Systems, MWSCAS 2015, Fort Collins, CO, USA, August 2-5, 2015. pages 1-4, IEEE, 2015. [doi]

Abstract

Abstract is missing.