N. I. Dumoulin Stuyck, R. Li, C. Godfrin, A. Elsayed, S. Kubicek, J. Jussot, B. T. Chan, F. A. Mohiyaddin, M. Shehata, G. Simion, Y. Canvel, L. Goux, M. Heyns, B. Govoreanu, I. P. Radu. Uniform Spin Qubit Devices with Tunable Coupling in an All-Silicon 300 mm Integrated Process. In 2021 Symposium on VLSI Circuits, Kyoto, Japan, June 13-19, 2021. pages 1-2, IEEE, 2021. [doi]
Abstract is missing.