Close-loop self-compensation of the coupling error for silicon micromachined gyroscope - researchr publication authors

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Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhihua Chen, Zhanqiang Hou. Close-loop self-compensation of the coupling error for silicon micromachined gyroscope. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1010-1013, IEEE, 2013. [doi]

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