Close-loop self-compensation of the coupling error for silicon micromachined gyroscope

Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhihua Chen, Zhanqiang Hou. Close-loop self-compensation of the coupling error for silicon micromachined gyroscope. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1010-1013, IEEE, 2013. [doi]

@inproceedings{SuXWCH13,
  title = {Close-loop self-compensation of the coupling error for silicon micromachined gyroscope},
  author = {Jianbin Su and Dingbang Xiao and Xuezhong Wu and Zhihua Chen and Zhanqiang Hou},
  year = {2013},
  doi = {10.1109/NEMS.2013.6559893},
  url = {http://dx.doi.org/10.1109/NEMS.2013.6559893},
  researchr = {https://researchr.org/publication/SuXWCH13},
  cites = {0},
  citedby = {0},
  pages = {1010-1013},
  booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
  publisher = {IEEE},
}