3D-stacked Strained SiGe/Ge Gate-All-Around (GAA) Structure Fabricated by 3D Ge Condensation - researchr publication authors

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Junkyo Suh, Andrew C. Meng, Marc Jaikissoon, Michael Braun, Taeho R. Kim, Ann F. Marshall, Anahita Pakzad, Paul C. McIntyre, Krishna C. Saraswat. 3D-stacked Strained SiGe/Ge Gate-All-Around (GAA) Structure Fabricated by 3D Ge Condensation. In Device Research Conference, DRC 2019, Ann Arbor, MI, USA, June 23-26, 2019. pages 249-250, IEEE, 2019. [doi]

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