Synthesis and characterization of sub-micron sized copper-ruthenium-tantalum composites for interconnection application

R. Sule, P. A. Olubambi, B. T. Abe, O. T. Johnson. Synthesis and characterization of sub-micron sized copper-ruthenium-tantalum composites for interconnection application. Microelectronics Reliability, 52(8):1690-1698, 2012. [doi]

Abstract

Abstract is missing.