Design and analysis of a new flexure-based XY micropositioning stage with decoupled motion characteristic

Xiantao Sun, Weihai Chen, Rui Zhou 0011, Jianbin Zhang, Wenjie Chen. Design and analysis of a new flexure-based XY micropositioning stage with decoupled motion characteristic. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, China, December 11-14, 2012. pages 1011-1016, IEEE, 2012. [doi]

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