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Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

Changhe Sun, Yufei Liu, Bolun Li, Wenqu Su, Mingzhang Luo, Guofeng Du, Yaming Wu. Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors, 21(16):5513, 2021. [doi]

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