Changhe Sun, Bolun Li, Wenqu Su, Yufei Liu, Yaming Wu. Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 704-708, IEEE, 2021. [doi]
@inproceedings{SunLSLW21,
title = {Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle},
author = {Changhe Sun and Bolun Li and Wenqu Su and Yufei Liu and Yaming Wu},
year = {2021},
doi = {10.1109/NEMS51815.2021.9451305},
url = {https://doi.org/10.1109/NEMS51815.2021.9451305},
researchr = {https://researchr.org/publication/SunLSLW21},
cites = {0},
citedby = {0},
pages = {704-708},
booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
publisher = {IEEE},
isbn = {978-1-6654-1941-3},
}