Changhe Sun, Bolun Li, Wenqu Su, Yufei Liu, Yaming Wu. Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 704-708, IEEE, 2021. [doi]
Abstract is missing.