Jiamian Sun, Zhi Tao, Haiwang Li, Kaiyun Zhu, Donghui Wang, Hanxiao Wu, Tiantong Xu. A MEMS Voice Coil Motor with a 3D Solenoid Coil. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1745-1748, IEEE, 2021. [doi]
Abstract is missing.