YuXi Sun, Naiqi Wu, MengChu Zhou. Closed-form solution for cycle time of revisiting processes in single-arm cluster tool scheduling with atomic layer deposition. In Proceedings of the IEEE International Conference on Networking, Sensing and Control, ICNSC 2011, Delft, The Netherlands, 11-13 April 2011. pages 377-382, IEEE, 2011. [doi]
Abstract is missing.