Xin Sun, Yunhui Zhu, Zhen Hua Liu, Qing-hu Cui, Shenglin Ma, Jing Chen, Min Miao, Yufeng Jin. Electrical characterization of integrated passive devices using thin film technology for 3D integration. Journal of Zhejiang University - Science C, 14(4):235-243, 2013. [doi]
Abstract is missing.