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First Experimental Study of Floating-Body Cell Transient Reliability Characteristics of Both N- and P-Channel Vertical Gate-All-Around Devices with Split-Gate Structures

Cheng-Lin Sung, Sheng-Ting Fan, Hang-Ting Lue, Wei-Chen Chen, Pei-Ying Du, Teng-Hao Yeh, Keh-Chung Wang, Chih-Yuan Lu. First Experimental Study of Floating-Body Cell Transient Reliability Characteristics of Both N- and P-Channel Vertical Gate-All-Around Devices with Split-Gate Structures. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 7, IEEE, 2022. [doi]

Authors

Cheng-Lin Sung

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Sheng-Ting Fan

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Hang-Ting Lue

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Wei-Chen Chen

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Pei-Ying Du

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Teng-Hao Yeh

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Keh-Chung Wang

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Chih-Yuan Lu

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