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Effect of sputtering condition on the surface properties of silicon oxide thin films prepared for liquid crystal alignment layers

Shi-Joon Sung, Eun-Ae Jung, Dae-Hwan Kim, Jin-Kyu Kang, Kee-Jeong Yang, Yun-seon Do, Byeong-dae Choi. Effect of sputtering condition on the surface properties of silicon oxide thin films prepared for liquid crystal alignment layers. Displays, 31(2):93-98, 2010. [doi]

Authors

Shi-Joon Sung

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Eun-Ae Jung

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Dae-Hwan Kim

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Jin-Kyu Kang

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Kee-Jeong Yang

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Yun-seon Do

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Byeong-dae Choi

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