Shi-Joon Sung, Eun-Ae Jung, Dae-Hwan Kim, Jin-Kyu Kang, Kee-Jeong Yang, Yun-seon Do, Byeong-dae Choi. Effect of sputtering condition on the surface properties of silicon oxide thin films prepared for liquid crystal alignment layers. Displays, 31(2):93-98, 2010. [doi]
Abstract is missing.